On the Modeling of the Donor/Acceptor Compensation Ratio in Carbon‐Doped GaN to Univocally Reproduce Breakdown Voltage and Current Collapse in Lateral GaN Power HEMTs

The intentional doping of lateral GaN power high electron mobility transistors (HEMTs) with carbon (C) impurities is a common technique to reduce buffer conductivity and increase breakdown voltage. Due to the introduction of trap levels in the GaN bandgap, it is well known that these impurities give rise to dispersion, leading to the so‐called “current collapse” as a collateral effect. Moreover, first‐principles calculations and experimental evidence point out that C introduces trap levels of both acceptor and donor types. Here, we report on the modeling of the donor/acceptor compensation ratio (CR), that is, the ratio between the density of donors and acceptors associated with C doping, to consistently and univocally reproduce experimental breakdown voltage (VBD) and current‐collapse magnitude (ΔICC). By means of calibrated numerical device simulations, we confirm that ΔICC is controlled by the effective trap concentration (i.e., the difference between the acceptor and donor densities), but we show that it is the total trap concentration (i.e., the sum of acceptor and donor densities) that determines VBD, such that a significant CR of at least 50% (depending on the technology) must be assumed to explain both phenomena quantitatively. The results presented in this work contribute to clarifying several previous reports, and are helpful to device engineers interested in modeling C‐doped lateral GaN power HEMTs

The effects of carbon on the bidirectional threshold voltage instabilities induced by negative gate bias stress in GaN MIS-HEMTs

In this paper, numerical device simulations are used to point out the possible contributions of carbon doping to the threshold voltage instabilities induced by negative gate bias stress in AlGaN/GaN metal–insulator–semiconductor high-electron mobility transistors. It is suggested that carbon can have a role in both negative and positive threshold voltage shifts, as a result of (1) the changes in the total negative charge stored in the carbon-related acceptor traps in the GaN buffer, and (2) the attraction of carbon-related free holes to the device surface and their capture into interface traps or recombination with gate-injected electrons. For a proper device optimization of carbon-doped MIS-HEMTs, it is therefore important to take these mechanisms into account, in addition to those related to defects in the gate dielectric volume and interface which are conventionally held responsible for threshold voltage instabilities

Systematic modeling of electrostatics, transport, and statistical variability effects of interface traps in end-of-the-roadmap III–V MOSFETs

Thanks to their superior transport properties, indium gallium arsenide (InGaAs) metal-oxide-semiconductor field-effect transistors (MOSFETs) constitute an alternative to conventional silicon MOSFETs for digital applications at ultrascaled nodes. The successful integration of this technology is challenged mainly by the high defect density in the gate oxide and at the interface with the semiconductor channel, which degrades the electrostatics and could limit the potential benefits over Si. In this work, we: 1) establish a systematic modeling approach to evaluate the performance degradation due to interface traps in terms of electrostatics and transport of InGaAs dual-gate ultrathin body (DG-UTB) FETs and 2) investigate the effects of random interface-trap concentration as another roadblock to the scaling of the technology, due to statistical variability of the threshold voltage. Variability is assessed with a Technology CAD (TCAD) simulator calibrated against multi-subband Monte Carlo (MSMC) simulations. The modeling approach overcomes the TCAD limitations when dealing with ultrathin channels (i.e., below 5 nm) without altering crucial geometrical parameters that would compromise the dependability of the variability analysis. Our results indicate that interface-trap fluctuation becomes comparable with the other variability sources dominating the total variability when shrinking the device dimensions, thus contrasting the trend of reduced variability with scaling. This, in turn, implies that interface and border traps may strongly limit the benefits of InGaAs over Silicon if not effectively reduced by gate process optimization

GaN-based power devices: Physics, reliability, and perspectives

Over the last decade, gallium nitride (GaN) has emerged as an excellent material for the fabrication of power devices. Among the semicon- ductors for which power devices are already available in the market, GaN has the widest energy gap, the largest critical field, and the highest saturation velocity, thus representing an excellent material for the fabrication of high-speed/high-voltage components. The presence of spon- taneous and piezoelectric polarization allows us to create a two-dimensional electron gas, with high mobility and large channel density, in the absence of any doping, thanks to the use of AlGaN/GaN heterostructures. This contributes to minimize resistive losses; at the same time, for GaN transistors, switching losses are very low, thanks to the small parasitic capacitances and switching charges. Device scaling and monolithic integration enable a high-frequency operation, with consequent advantages in terms of miniaturization. For high power/high- voltage operation, vertical device architectures are being proposed and investigated, and three-dimensional structures—fin-shaped, trench- structured, nanowire-based—are demonstrating great potential. Contrary to Si, GaN is a relatively young material: trapping and degradation processes must be understood and described in detail, with the aim of optimizing device stability and reliability. This Tutorial describes the physics, technology, and reliability of GaN-based power devices: in the first part of the article, starting from a discussion of the main proper- ties of the material, the characteristics of lateral and vertical GaN transistors are discussed in detail to provide guidance in this complex and interesting field. The second part of the paper focuses on trapping and reliability aspects: the physical origin of traps in GaN and the main degradation mechanisms are discussed in detail. The wide set of referenced papers and the insight into the most relevant aspects gives the reader a comprehensive overview on the present and next-generation GaN electronics

Evaluation of VTH and RON Drifts during Switch-Mode Operation in Packaged SiC MOSFETs

In this paper, we investigate the evolution of threshold voltage (VTH) and on-resistance (RON) drifts in the silicon carbide (SiC) power metal-oxide-semiconductor field-effect transistors (MOSFETs) during the switch-mode operation. A novel measurement setup for performing the required on-the-fly characterization is presented and the experimental results, obtained on commercially available TO-247 packaged SiC devices, are reported. Measurements were performed for 1000 s, during which negative VTH shifts (i.e., VTH decrease) and negative RON drifts (i.e., RON decrease) were observed. To better understand the origin of these parameter drifts and their possible correlation, measurements were performed for different (i) gate-driving voltage (VGH) and (ii) off-state drain voltage (VPH). We found that VTH reduction leads to a current increase, thus yielding RON to decrease. This correlation was explained by the RON dependence on the overdrive voltage (VGS–VTH). We also found that gate-related effects dominate the parameter drifts at low VPH with no observable recovery, due to the repeated switching of the gate signal required for the parameter monitoring. Conversely, the drain-induced instabilities caused by high VPH are completely recoverable within 1000 s from the VPH removal. These results show that the measurement setup is able to discern the gate/drain contributions, clarifying the origin of the observed VTH and RON drifts

Variability and sensitivity to process parameters variations in InGaAs Dual-Gate Ultra-Thin Body MOSFETS: A scaling perspective

In this work, we present a combined analysis on the statistical variability of threshold voltage, on-state current, and leakage current of III-V ultra-scaled MOSFETs. In addition, we analyze the sensitivity of threshold voltage to critical geometrical and process parameters variations (i.e, gate length, channel thickness, oxide thickness and channel doping). Our analysis verifies the scaling potential of the InGaAs Technology from the variability/sensitivity standpoint for two technologicaTnodes (Lg = 15 nm, Lg = 10.4 nm), by means of Quantum Drift-Diffusion (QDD) simulations. The structure under investigation is a template Dual-Gate Ultra-Thin Body device realized following ITRS projections. The variability sources under consideration are: Random Dopant Fluctuation (RDF), Work Function Fluctuation (WFF), Body- and Gate-Line Edge Roughness (LER). The sensitivity analysis of threshold voltage is performed by considering also the effects of statistical variability to evaluate their combined effect. The results of the statistical variability analysis highlight the importance of carefully controlling Body-LER, as forecasted in the new IRDS report. Moreover, the combined effect of variability and sensitivity to channel thickness are found to be critical to the scaling process (down to Lg =10.4 nm), as it leads to significant leakage increase or performance reduction, potentially resulting in always-on devices

Self-Heating and Reliability-Aware “Intrinsic” Safe Operating Area of Wide Bandgap Semiconductors – An Analytical Approach

The emergence of several technology options and the ever-broadening range of applications (e.g., automotive, smart grids, solar/wind farms) for power electronic devices suggest both a need and an opportunity to develop unifying principles to guide the development of wide bandgap (WBG) semiconductors. Unfortunately, power electronic devices are typically evaluated with a variety of elementary figure of merits (FOMs), which offer inconsistent/contradictory projections regarding the relative merits of emerging technologies. Indeed, one relies on the empirical (extrinsic) safe-operating area (SOA) of a packaged device to ultimately assess the performance potential of a technology option. Unfortunately, extrinsic SOA can only be calculated a posteriori, i.e., after precise measurement of the fabricated device parameters, making it suitable only for relatively mature technologies. Based on the insights of material-device-circuit-system performance analysis of a variety of idealized WBG power electronic devices (e.g., GaN HEMT, β-Ga2O3 MOSFET), in this paper, we analytically derive a comprehensive, substrate-, self-heating-, and reliability-aware “intrinsic/limiting” safe operating area (SOA) that establishes a priori, i.e., before device fabrication, the optimum and self-consistent trade-off among breakdown voltage, power consumption, operating frequency, heat dissipation, and reliability. We establish the relevance of the intrinsic-SOA by comparing its prediction with a broad range of experimental data available in the literature. In between the traditional FOMs and extrinsic SOA, the intrinsic SOA allows fundamental/intuitive re-evaluation of intrinsic technology potential for power electronic devices and identifies specific performance bottlenecks and how to circumvent them

The Role of Carbon Doping on Breakdown, Current Collapse and Dynamic On-Resistance Recovery in AlGaN/GaN High Electron Mobility Transistors on Semi‐Insulating SiC Substrates

In this work, the critical role of carbon doping in the electrical behavior of AlGaN/GaN High Electron Mobility Transistors (HEMTs) on semi-insulating SiC substrates is assessed by investigating the off-state three terminal breakdown, current collapse and dynamic on-resistance recovery at high drain-source voltages. Extensive device simulations of typical GaN HEMT structures are carried out and compared to experimental data from published, state-of-the-art technologies to: i) explain the slope of the breakdown voltage as a function of the gate-to-drain spacing lower than GaN critical electric field as a result of the non-uniform electrical field distribution in the gate-drain access region; ii) attribute the drain current collapse to trapping in deep acceptor states in the buffer associated with carbon doping; iii) interpret the partial dynamic on-resistance recovery after off-state stress at high drain-source voltages as a consequence of hole generation and trapping

Evaluation of VTH and RON Drifts during Switch-Mode Operation in Packaged SiC MOSFETs

In this paper, we investigate the evolution of threshold voltage (VTH) and on-resistance (RON) drifts in the silicon carbide (SiC) power metal-oxide-semiconductor field-effect transistors (MOSFETs) during the switch-mode operation. A novel measurement setup for performing the required on-the-fly characterization is presented and the experimental results, obtained on commercially available TO-247 packaged SiC devices, are reported. Measurements were performed for 1000 s, during which negative VTH shifts (i.e., VTH decrease) and negative RON drifts (i.e., RON decrease) were observed. To better understand the origin of these parameter drifts and their possible correlation, measurements were performed for different (i) gate-driving voltage (VGH) and (ii) off-state drain voltage (VPH). We found that VTH reduction leads to a current increase, thus yielding RON to decrease. This correlation was explained by the RON dependence on the overdrive voltage (VGS–VTH). We also found that gate-related effects dominate the parameter drifts at low VPH with no observable recovery, due to the repeated switching of the gate signal required for the parameter monitoring. Conversely, the drain-induced instabilities caused by high VPH are completely recoverable within 1000 s from the VPH removal. These results show that the measurement setup is able to discern the gate/drain contributions, clarifying the origin of the observed VTH and RON drifts